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发明名称
PROCESSING EQUIPMENT
摘要
申请公布号
JPH06204147(A)
申请公布日期
1994.07.22
申请号
JP19930235357
申请日期
1993.08.28
申请人
TOKYO ELECTRON LTD
发明人
IMAHASHI KAZUNARI
分类号
C23C16/50;C23C16/44;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/205
主分类号
C23C16/50
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代理人
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