MANUFACTURE OF SILICON CRYSTAL FILM BY THERMAL CVD,申请号JP19920347764-传众专利搜索

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发明名称	MANUFACTURE OF SILICON CRYSTAL FILM BY THERMAL CVD
摘要
申请公布号	JPH06204141(A)	申请公布日期	1994.07.22
申请号	JP19920347764	申请日期	1992.12.28
申请人	TONEN CORP	发明人	SAGAWA YASUNORI
分类号	C23C16/24;H01L21/02;H01L21/205;(IPC1-7):H01L21/205	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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