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发明名称
CATHODE REPLACING DEVICE
摘要
申请公布号
JPH06203779(A)
申请公布日期
1994.07.22
申请号
JP19920348225
申请日期
1992.12.28
申请人
MITSUBISHI HEAVY IND LTD;JEOL LTD
发明人
WAKAMOTO IKUO;URANO SUSUMU;KONNO SHIGEO
分类号
C23C14/32;H01J37/067;H01J37/30;(IPC1-7):H01J37/067
主分类号
C23C14/32
代理机构
代理人
主权项
地址
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