发明名称 EVALUATING METHOD FOR RELIABILITY OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a quantitative evaluation method for improvement in strength of bonded interface having non-flat resin-sealed semiconductor package. CONSTITUTION:The strength of bonded interface of a semiconductor device is evaluated in such a manner that, using the semiconductor package of semiconductor device as a structural model, the stress increase coefficient of the bonded interface is computed by considering the peeling on the non-flat bonded interface inside the semiconductor package as the cracks on the interface, and the degree of peeling is evaluated quantitatively.
申请公布号 JPH06204313(A) 申请公布日期 1994.07.22
申请号 JP19930259922 申请日期 1993.10.18
申请人 MITSUBISHI ELECTRIC CORP 发明人 SATO MITSURU;TANI SHUICHI;INOUE AKIO;MIYAZAKI MASAYUKI;IWAOKA MASATO;YOSHIOKA SUMIO
分类号 G01N3/00;G01N19/04;H01L21/56;H01L21/66 主分类号 G01N3/00
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