| 摘要 |
<p>An ink jet head which comprises a thin vibration plate on a semiconductor substrate such as of silicon, and an electrode opposed to the vibration plate, wherein ink is emitted by deformation of the vibration plate when static charge is applied to the vibration plate and the electrode. A single- or multi-layered metallic film in ohmic contact with the semiconductor substrate is formed as a common electrode. A group III or V element is introduced in a high concentration to the portion of the semiconductor substrate, where the common electrode is formed. Since the supply and removal of the charge to and from the vibration plate can be made at a high speed, high-frequency vibration is achieved to carry out high speed printing.</p> |
