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发明名称
Verfahren zur Herstellung eines Halbleitersensors mit trichterförmigen Öffnungen in dem Halbleitersubstrat.
摘要
申请公布号
DE69009936(D1)
申请公布日期
1994.07.21
申请号
DE19906009936
申请日期
1990.11.15
申请人
KABUSHIKI KAISHA TOSHIBA, KAWASAKI, KANAGAWA
发明人
HIRANO, HIROKAZU, C/O INTELLECTUAL PROPERTYDIV., MINATO-KU, TOKYO 105;YAMAKI, BUNSHIRO, C/O INTELLECTUAL PROPERTYDIV., MINATO-KU, TOKYO 105
分类号
G01P15/08;G01P15/12;H01L29/84;(IPC1-7):G01P15/12
主分类号
G01P15/08
代理机构
代理人
主权项
地址
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