发明名称 DEVICE FOR THE VACUUM-PLASMA TREATMENT OF ARTICLES
摘要 A device for the vacuum-plasma treatment of articles comprises a vacuum chamber (1) housing an elongated anode (2), a vacuum-arc discharge cathode (3) and a support (5), in particular for an article (6) undergoing treatment, situated between the anode (2) and cathode (3). A screen (7) which is impermeable to metal ions is provided in the chamber (1) between the cathode (3) and the support (5). The support (5) is designed to hold the article undergoing treatment at both the latter's end faces (8, 9) and is provided with a current supply line (10) at each end corresponding to the respective end face (8, 9) of the article (6). The anode (2) is elongated and parallel to a line between the two end faces (8, 9) of the article (6) and has a current supply line (11) at each end. Two pairs of current supply lines (10, 11) are connected to the positive terminal of the arc power source (4) via a switch (12) and each pair of current supply lines (10, 11) can be connected in turn.
申请公布号 WO9416117(A1) 申请公布日期 1994.07.21
申请号 WO1992RU00261 申请日期 1992.12.30
申请人 NAUCHNO-PROIZVODSTVENNOE PREDPRIYATIE "NOVATEKH";GRIGORIEV, SERGEI NIKOLAEVICH 发明人 GRIGORIEV, SERGEI NIKOLAEVICH
分类号 C23C14/02;C23C14/24;C23C14/32;C23C16/50;C23F4/00;H01J37/32;(IPC1-7):C23C14/24 主分类号 C23C14/02
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