| 摘要 |
<p>The scanning area of a specimen is divided into m sections (m is an integer of two or more) in the subscanning direction. The range of one of the measurement conditions or parameters is graded into m stages. The values of the m stages are assigned to the m sections of the scanning areas in order. The images picked up under the m stages of the condition or parameter respectively are displayed on a screen simultaneously so that the images can be compared. One of the images is selected and the value of the condition or parameter corresponding to the selected image is determined.</p> |
