发明名称 Control of conductive material evapn.
摘要 In a process for controlling evapn. of one or more conductive materials from one or more parallel-connected resistive evaporators, the novelty is that (a) the current (I), voltage (U) and/or power consumption (P) are continuously measured at least after the start of evapn.; (b) a rate of change (W), corresponding to dI/dt, dU/dt, dR/dt or dP/dt, is determined; and (c) evapn. is terminated by switching off the evaporator current source when the change rate (W) drops below a preset threshold value.
申请公布号 DE4308616(C1) 申请公布日期 1994.07.21
申请号 DE19934308616 申请日期 1993.03.18
申请人 VTD-VAKUUMTECHNIK DRESDEN GMBH, 01257 DRESDEN 发明人 EHRLICH, ULRIKE, O-8300 PIRNA;GRIMM, WERNER, DR., O-8054 DRESDEN;ULLMANN, LUTZ, O-8045 DRESDEN;FISCHER, DIETMAR, O-8045 DRESDEN
分类号 C23C14/26;C23C14/54;(IPC1-7):C23C14/26;H05B3/00 主分类号 C23C14/26
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