发明名称 |
Control of conductive material evapn. |
摘要 |
In a process for controlling evapn. of one or more conductive materials from one or more parallel-connected resistive evaporators, the novelty is that (a) the current (I), voltage (U) and/or power consumption (P) are continuously measured at least after the start of evapn.; (b) a rate of change (W), corresponding to dI/dt, dU/dt, dR/dt or dP/dt, is determined; and (c) evapn. is terminated by switching off the evaporator current source when the change rate (W) drops below a preset threshold value.
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申请公布号 |
DE4308616(C1) |
申请公布日期 |
1994.07.21 |
申请号 |
DE19934308616 |
申请日期 |
1993.03.18 |
申请人 |
VTD-VAKUUMTECHNIK DRESDEN GMBH, 01257 DRESDEN |
发明人 |
EHRLICH, ULRIKE, O-8300 PIRNA;GRIMM, WERNER, DR., O-8054 DRESDEN;ULLMANN, LUTZ, O-8045 DRESDEN;FISCHER, DIETMAR, O-8045 DRESDEN |
分类号 |
C23C14/26;C23C14/54;(IPC1-7):C23C14/26;H05B3/00 |
主分类号 |
C23C14/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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