Verfahren zur Herstellung einer Einkristallschicht aus Diamant.
摘要
A single crystal diamond film having good crystallinity and electrical and optical characteristics is produced by a method which comprises steps of decomposing a raw material gas comprising a hydrogen gas, a carbon containing compound and an oxygen-containing compound and growing a single crystal diamond film on a substrate in a vapor phase.
申请公布号
DE69009799(D1)
申请公布日期
1994.07.21
申请号
DE1990609799
申请日期
1990.03.07
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA
发明人
SHIOMI, HIROMU, C/O ITAMI WORKS OF, ITAMI-SHI, HYOGO-KEN;IMAI, TAKAHIRO, C/O ITAMI WORKS OF, ITAMI-SHI, HYOGO-KEN;FUJIMORI, NAOJI, C/O ITAMI WORKS OF, ITAMI-SHI, HYOGO-KEN