Direct load/unload semiconductor wafer cassette apparatus and transfer system.

摘要

A semiconductor cassette and transfer system for facilitating the direct loading and unloading of wafers (31) from different sides of a cassette (10) by a first robot handling means (54) moveable along a first extension axis (69) and second robot handling means (59a) moveable along a second extension axis (71a) intersecting said first extension axis (69) at an acute angle ( theta ), and at a predetermined point concurrent with the center (73) of the cassette (10) it is disposed in a fixed position within a loadlock chamber (61a; 61b) of a wafer processing apparatus (55).