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发明名称
Method of making silicon quantum wires
摘要
申请公布号
GB2254188(B)
申请公布日期
1994.07.20
申请号
GB19920009555
申请日期
1992.05.01
申请人
THE * SECRETARY OF STATE FOR DEFENCE
发明人
LEIGH-TREVOR * CANHAM;JOHN MICHAEL * KEEN;WENG YEE * LEONG
分类号
H01L21/306;H01L29/06;H01L33/34;(IPC1-7):H01L33/00
主分类号
H01L21/306
代理机构
代理人
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