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发明名称
Process for producing interconnect structures on a semiconductor device, especially on an LSI circuit.
摘要
申请公布号
EP0343698(B1)
申请公布日期
1994.07.20
申请号
EP19890200972
申请日期
1989.04.17
申请人
N.V. PHILIPS' GLOEILAMPENFABRIEKEN
发明人
GRIEF, MALCOLM;DOAN, TRUNG;VAN HOUTUN, HENDRIKUS;VAN LAARHOVEN, JOSEPHUS
分类号
H01L21/3205;H01L21/768;H01L23/52;(IPC1-7):H01L21/90;C23F4/00
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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