发明名称 WET POLISHING METHOD AND APPARATUS
摘要 PURPOSE:To prevent separation of an abrasive agent in an abrasive liquid and to improve the polishing efficiency by heating the abrasive liquid and supplying the same to a polishing part in an apparatus adapted to bring the polishing surfaces of rotating buff wheels into press contact with the surface, to be polished, of a work and polish the work while supplying the abrasive liquid. CONSTITUTION:Buff wheels 22, 32, the bases of which are used as polishing surfaces, are fixed to the points of the respective rotary shafts 21, 31 of rotational driving devices 2, 3. Polishing surfaces 221, 321 of the buff wheels 22, 32 are brought into press contact with the surface, to be polished, of a work W placed on a freely rotatable support board 1, and the work W is polished under the supply of abrasive liquid by the rotation of the respective buff wheels 22, 32. The abrasive liquid is force-fed from a liquid storing vessel 5 by a pump P, and the abrasive liquid after use is recovered in a pan 4 and returned to storing vessel 5. In this case, abrasive liquid B is heated to a temperature ranging from 37 deg.C-60 deg.C by an electric heater 6. Thus, the abrasive agent is favorably dispersed in the abrasive liquid in co-operation with the operation of a stirring 8.
申请公布号 JPH06198559(A) 申请公布日期 1994.07.19
申请号 JP19920359981 申请日期 1992.12.31
申请人 B B F YAMATE:KK 发明人 KAWASAKI SHUJI
分类号 B24B29/00;B24B57/02;(IPC1-7):B24B29/00 主分类号 B24B29/00
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