发明名称 |
Thermal fixture for testing an integrated circuit |
摘要 |
Apparatus for controlling the temperature of an integrated circuit. A thermally conductive block has a vacuum passage connected to a vacuum pump for clamping the block to the top of an integrated circuit housing without mechanical clamping structures. A closed fluid loop including a circulating pump, heater and chiller modulate the temperature of a fluid passing through the conductive block thereby to control its temperature and the temperature of the integrated circuit independently of any other integrated circuit.
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申请公布号 |
US5331273(A) |
申请公布日期 |
1994.07.19 |
申请号 |
US19920866920 |
申请日期 |
1992.04.10 |
申请人 |
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF THE NAVY |
发明人 |
SCHNEIDER, WALTER T. |
分类号 |
G01R1/04;(IPC1-7):G01R31/02;H01L23/44 |
主分类号 |
G01R1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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