| 摘要 |
<p>PURPOSE:To prevent an attracting capacity from deteriorating coused by the deposition of dust on an attracting surface and the surface roughness of an object to be attracted in the object to be attracted with an electrostatic force in the application of DC current between electrodes by forming an elastic layer on the surface of an electrostatic chuck body. CONSTITUTION:An electrostatic chuck has an electrostatic chuck body 20 having two metallic electrods 2a, 2b incorporated in a dielectric 1. A dielectric polalization phenomenon is generated in the dielectric 1 by applying DC voltage between two electrodes 2a, 2b from a DC power source 3. When under such a condition an object 4 to be attracted such as a conductor and semiconductor is mounted on the electrostatic chuck body 20, the object 4 to be attracted is attracted fixedly by an electrostatic force. Then, the dielectric 1 is composed of a non-elastic dielectric layer 1a and elestic layer 1b and the electrodes 2a, 2b are embedded in the non-elastic dielectic layer 1a side. Thus, even if dust is deposited on the object 4 to be attracted, the dust is buried in the elastic layer 1b so that the object 4 can be fixedly surely attracted.</p> |
