发明名称 HIGH PRESSURE LIQUID PHASE EPITAXIAL REACTION BOX WITH FUNCTION TO PERMIT INTERIOR THEREOF TO BE DIRECTLY SEEN THERETHROUGH AND METHOD THEREFOR
摘要 An apparatus (10) and method are provided for directly viewing, through a viewport assembly (26), the process for forming a layer of mercury cadmium telluride of a predetermined composition on a surface of a wafer (not shown). According to the invention, a molten melt (20) comprising mercury, cadmium and tellurium is provided in a vertically oriented crystal growth chamber (14), which, in turn, is housed in a reactor tube (12). A wafer (not shown) is contacted with the crystal growth melt while cooling the melt below its liquidus temperature at a predetermined rate sufficient to cause a crystal growth layer of mercury cadmium telluride to form on the wafer (not shown). Viewports (26, 48) located approximately radially adjacent to the melt (22) provide direct see through capability to visually monitor the crystal growth process. The present invention is advantageous because the apparatus and method disclosed provide for ease of the growth set-up and operation, yielding mercury cadmium telluride layers of uniform composition and of high purity.
申请公布号 JPH06199591(A) 申请公布日期 1994.07.19
申请号 JP19930184092 申请日期 1993.07.26
申请人 TEXAS INSTR INC <TI> 发明人 JIEFURII EMU ANDAASON
分类号 C30B19/06;C30B19/04;C30B19/10;C30B29/46;H01L21/208 主分类号 C30B19/06
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