| 摘要 |
<p>PURPOSE:To enhance resolution and heat resistance by incorporating an alkali- soluble novolak resin and at least one of alkali-soluble vinyl polymers, a solvent and a pigment. CONSTITUTION:The resist composition comprises the alkali-soluble novolak resin and at least one of the alkali-soluble vinyl polymers, the solvent and the pigment. The alkali-soluble novolak resin is embodied by the ones obtained by condensing phenols and aldehydes in the presence of an acid catalyst and the alkali-soluble vinyl polymer is embodied by vinylphenol copolymers, resins obtained by hydrogenating polyvinylphenols, and polyvinyl phenols. The alkali- soluble novolak resin and the alkali-soluble vinyl polymer mixed in accordance with sensitivity or resolution or transparency to be required as the resist, and for example, when high resolution is required, 10-300 pts.wt. of the vinyl polymer are mixed with 100 pts.wt. of the novolak resin.</p> |
