| 摘要 |
<p>PURPOSE:To make possible a temperature measurement bout each wafer by a method wherein a protecting tube with a plurality of thermo-couples inserted therein is provided so as to be able to attach or detach to or from the upper and lower plates of the title boat and so as to be able to rotate with the longitudinal direction as an axis amoung support pillars and branch pipes are made to project from the protecting tube in a length to reach the central parts of the support pillars. CONSTITUTION:A boat 1 is formed into a form that an upper plate 11 and a lower plate 12 are connected to each other through support pillars 13 at several places on the respective plates. Wafers are loaded on the support pillars 13. A thermocouple protective tube 2 made of a quartz tube is further stretched between the plates 11 and 12. As the intervals between the wafers on the boat are normally 4.7625mm, the protecting tube 2 can be rotated among the wafers with the longitudinal direction of the tube 2 as an axis. Accordingly, branch pipes are held attaching to the tube 2, the tube 2 is rotated and the positions of thermocouples 3 are adjusted, whereby an arbitrary position on each wafer can be temperature-measured. In such a way, as the thermocouples are made to position near the wafers, the value of a temperature closer to the actual temperature of the wafers can be obtained.</p> |
