| 摘要 |
<p>PURPOSE:To provide an electric field emission negative electrode with large current density and stable characteristic which is advantageous for enlargement of area by forming, on a base, a negative electrode part having a fine needle electrode oriented in a determined direction and having one end exposed so as to have a determined form. CONSTITUTION:A photoresist 7 in which a fine needle electrode material 6 of ultrafine grain is mixed is applied onto a silicon base 1. This electrode material 6 is oriented to the right angle to the silicon base 1, and the photoresist 7 is then hardened. The photoresist 7 is photo-etched and patterned into columns. The photoresist 7 is electively etched to protrude one end of the electrode material 6 from the upper part of the photoresist 7. Thereafter, a voltage applying conductive film 8 is formed on the silicon base 1 and the photoresist 7, and patterned into a determined form by etching. Thus, a field emission negative electrode in which one end of the fine needle electrode is exposed from the negative electrode part on the base is provided.</p> |
