| 摘要 |
<p>PURPOSE:To provide a semiconductor acceleration sensor having such a beam structure as a weight part is coupled with a supporting part through beam parts on the both sides in which a desired acceleration can be detected highly accurately by disposing a gauge having sensitivity only in the front face direction at the beam part. CONSTITUTION:A substrate 10 comprises a supporting frame section 11, a weight section 12 disposed inside the supporting section 11, and beam sections 13, 14 for coupling the weight section 12, on one and the other sides thereof, with the supporting section 11 and produce strain upon application of acceleration. A gauge disposed at the beam sections 13, 14 and producing an output corresponding to the acceleration has sensitivity in the front face direction of the sensor and has no sensitivity in the longitudinal and lateral directions.</p> |
