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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH06196476(A)
申请公布日期
1994.07.15
申请号
JP19920342043
申请日期
1992.12.22
申请人
CANON INC
发明人
TAKAKURA HIDEO;MUKAI YASUO;NAKAMACHI YUMI;SUZUKI TOSHIO
分类号
H01L21/205;C23C14/34;H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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