| 摘要 |
PURPOSE:To make it possible to improve a photoelectric conversion efficiency of a photovoltaic device by deforming a substrate into a bow at least when a light activation layer is formed, by forming the light activation layer on a convex side of the substrate while the substrate is in this deformed state, and by making the substrate resume its original shape and providing a compressive stress to the light activation layer, thereby making the light activation layer dense. CONSTITUTION:A light activation layer 2 is formed on a substrate 1 while it is being deformed. After the formation of the light activation layer 2, the substrate 1 resumes its original shape. As a result of this, the light activation layer 2 receives a compressive stress, and hence it is made dense. The compressive stress is applied to the light activation layer 2 in a stepped manner. From this point of view, when thin layers, that is, a p-type semiconductor layer, an i-type semiconductor layer and an n-type semiconductor layer are laminated, in this order, on the substrate 1, the substrate 1 is deformed at the time of the formation of the p-type semiconductor layer so as to apply a compressive stress to this p-type semiconductor layer. Therefore, the compressive stress tends to increase when the light activation layer 2 becomes dense. The application of a compressive stress to the light activation layer 2 enables a photoelectric conversion efficiency to be improved. |
