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发明名称
ANNEALING METHOD FOR INP SINGLE CRYSTAL
摘要
申请公布号
JPH06196430(A)
申请公布日期
1994.07.15
申请号
JP19920342681
申请日期
1992.12.22
申请人
SHOWA DENKO KK
发明人
IWASAKI AKITSUGU
分类号
H01L21/265;H01L21/324;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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