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发明名称
SUBSTRATE CLEANING SOLUTION DROP RECEIVING DEVICE, SUBSTRATE TRANSFER DEVICE, AND SUBSTRATE CLEANING SYSTEM
摘要
申请公布号
JPH06196458(A)
申请公布日期
1994.07.15
申请号
JP19920358317
申请日期
1992.12.25
申请人
SUGAI:KK
发明人
KOYANAGI TETSUO;YAMAGUCHI HIROSHI;UEDA TSUTOMU
分类号
H01L21/304;H01L21/677;H01L21/68;(IPC1-7):H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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