PRODUCTION OF RADIATION-SENSITIVE COMPOUND AND RADIATION-SENSITIVE RESIN COMPOSITION CONTAINING THE OBTAINED COMPOUND

摘要

PURPOSE:To obtain a radiation-sensitive resin composition with the number of relatively large insoluble grains reduced immediately after the composition is produced, with an increase in the number of insoluble grains reduced even after preservation for a long period (excellent in preservation stability) and to improve the yield in forming an integrated circuit from the composition. CONSTITUTION:A compd. having hydroxyls is esterified by a quinone diazide sulfonic halide in the presence of solvent to produce a radiation-sensitive compd. The halide is brought into contact with solvent and wetted or made into a soln., and the wetted halide or soln. is brought into contact with a compd. having hydroxyls and esterified. The radiation-sensitive resin composition contains the compd. and an alkali-soluble resin.