| 摘要 |
PURPOSE: To automatically determine the thickness and the composition of respective layers of a multilayer structure by converting a function corresponding to a reflected strength signal into a function corresponding to a strength signal expressed as a function of the thickness in the multilayer structure. CONSTITUTION: The layers of a multilayer structure body 10a formed on a substrate 100 show slightly different refractive constants in respective interfaces. The function f(θ) corresponding to the reflection intensity signals measured as a function of the glancing angleθ(the supplementary angle of the incident angle), which is limited by the minimum angle valueθmin and the maximum angle valueθmax respectively, is converted into a function (d) corresponding to the formulated intensity signals as a function of the depth of the structure body 10a. The depth of respective interfaces d1 , d2 ,... dn of the structure body 10a and the relevant reflection intensity are directly displayed by the obtained function (d). The angle range fromθmin toθmax can be measured as a function of the glancing angle by measuring the intensity of the reflection from a sample to be measured by using an x ray diffractometer.
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