MANUFACTURE OF WEAK JUNCTION TYPE JOSEPHSON USING EDGE JUNCTION OF SUBMICRON AREA

摘要

PURPOSE:To easily obtain a weak junction type Josephson element having an excellent characteristic able to be suitably used for manufacturing DC-SQUID. CONSTITUTION:A niobium or niobium compound layer 24 to become a base electrode and an insulating layer 26 are formed on a substrate 20 by lamination, the layer 24 and the insulating layer 26 are etched by a reactive ion etching method so as to form an edge part, an insulating thin film 32 and an opposing electrode 34 are formed by lamination in this order followed by impressing voltage between the base electrode and the opposing electrode under a temperature where the base electrode of the layer 24 and the opposing electrode 34 become superconductive so as to perform electric field evaporation of metal atoms of the base electrode or the opposing electrode inside the void locating inside the insulating thin film 32 in order to form a metal bridge 36 of the nanometer size electrically connecting the base electrode to the opposing electrode.