摘要 |
PURPOSE: To provide a heat insulating technology for cryogenic facility having performance substantially equivalent to that when the entire facility is vacuum heat insulated, while substantially reducing the cost. CONSTITUTION: In this apparatus, a treatment column 1 is insulated by means of a vacuum casing 15 and a heat exchange system 2 is insulated by means of a cold box 19 under atmospheric pressure, accommodating a solid insulating material such as a material in particulate form. |