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发明名称
METHOD FOR FORMATION OF CONTACT HOLE IN SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06196433(A)
申请公布日期
1994.07.15
申请号
JP19920344268
申请日期
1992.12.24
申请人
SANYO ELECTRIC CO LTD
发明人
ICHIHASHI YOSHINARI
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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