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发明名称
DEVICE FOR CLEANING FILM FORMING SUBSTRATE
摘要
申请公布号
JPH06196457(A)
申请公布日期
1994.07.15
申请号
JP19920361704
申请日期
1992.12.24
申请人
DAIDO STEEL CO LTD
发明人
IRIE KANJI
分类号
B08B11/02;G11B5/31;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B11/02
代理机构
代理人
主权项
地址
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