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发明名称
METHOD AND DEVICE FOR SUPPLYING GAS FOR VAPOR GROWTH
摘要
申请公布号
JPH06196415(A)
申请公布日期
1994.07.15
申请号
JP19920346218
申请日期
1992.12.25
申请人
KAWASAKI STEEL CORP
发明人
TAKAGI NOBORU
分类号
C23C16/44;C23C16/455;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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