Movement arrangement for table of coordinate measurement machine

摘要

The movement arrangement contains a base plate (1) or guide with an object table (2) or carriage movable in one or more coordinate directions upon the plate. The base plate or guide acts as the stator of a single or multiple coordinate stepper motor.The base plate or guide has one or more plates (4), or a coating of weakly magnetic ceramic or other material, covering the region of movement of the carriage or table. Nozzles connected to an air supply are arranged in the facing surfaces of the base plate or guide and the table or carriage.