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发明名称
Verfahren zur Implantation von Ionen in einen Festkörper
摘要
申请公布号
DE4224686(C2)
申请公布日期
1994.07.14
申请号
DE19924224686
申请日期
1992.07.25
申请人
DAIMLER-BENZ AKTIENGESELLSCHAFT, 70567 STUTTGART
发明人
WONDRAK, WOLFGANG, DR., 60385 FRANKFURT
分类号
C23C14/48;H01L21/265;H01L21/266;H01L21/762;(IPC1-7):H01L21/265;H01L21/324;H01L21/74;H01L21/76;H01L21/90;H01L27/12
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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