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经营范围
发明名称
ION BEAM MACHINE
摘要
申请公布号
JPH06190569(A)
申请公布日期
1994.07.12
申请号
JP19920346438
申请日期
1992.12.25
申请人
RYODEN SEMICONDUCTOR SYST ENG KK;MITSUBISHI ELECTRIC CORP
发明人
KANBARA KYOKO;HIROSE YUKINORI
分类号
B23K15/00;B23K15/02;G01B11/24;G01N1/32;(IPC1-7):B23K15/00
主分类号
B23K15/00
代理机构
代理人
主权项
地址
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