发明名称 Positive image formation utilizing radiation sensitive mixture containing dimeric or trimeric sesamol/aldehyde condensation products as sensitivity enhancers
摘要 A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one dimeric or trimeric unit formed by the condensation reaction of an aldehyde with sesamol; the amount of said binder resin being about 60 to 95% by weight, the amount 40% of said photoactive component being about 5% to about by weight, based on the total solids content of said radiation-sensitive composition.
申请公布号 US5328806(A) 申请公布日期 1994.07.12
申请号 US19930134448 申请日期 1993.10.12
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 TOUKHY, MEDHAT A.
分类号 G03F7/022;(IPC1-7):G03F7/30;G03F7/023 主分类号 G03F7/022
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