发明名称 |
Device for forming film by photo-chemical vapor deposition |
摘要 |
The invention provides a film-forming apparatus by a photo-CVD method comprising such essential structural elements as a light inlet in the form of a tube, a film-forming chamber, a light outlet in the form of a tube and a nozzle for feeding a mixture of a reactant and a gas for dilution so that a specific relation exists in the dimensions between the elements. With this structure, the film-forming apparatus by a photo-CVD method prevents the blur of the laser beam-incoming window due to contaminants adhered thereto, thereby enabling the extension of reaction time, increase of the deposition, and formation of a film with uniform thickness, and making the composition of the film closest to the stoichiometric one.
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申请公布号 |
US5328514(A) |
申请公布日期 |
1994.07.12 |
申请号 |
US19910809915 |
申请日期 |
1991.12.19 |
申请人 |
OSAKA GAS COMPANY LIMITED |
发明人 |
INOUE, NAOKI;NAKAOKA, HARUYUKI;AZUMA, HIDEKI;MORIKAWA, SHIGERU;KOBAYASHI, TAKASHI |
分类号 |
C23C16/48;H01L21/205;H01L21/268;H01L21/31;(IPC1-7):C23C16/48 |
主分类号 |
C23C16/48 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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