| 摘要 |
<p>PURPOSE:To convey an article such as a semiconductor wafer between a semiconductor manufacturing device and an article storing warehouse efficiently. CONSTITUTION:The system is composed to process an article in a semiconductor manufacturing device 7, and before the article is finished to process, a signal is outputted from the semiconductor manufacturing device 7 so as to convey an article to process next time to the semiconductor manufacturing device 7, and the article the process is completed is to be conveyed to a storehouse 3 for process completed articles, or a next process. Consequently, the operation rate of the manufacturing device of article can be improved, and the conveying efficiency of an automatic conveyer 5 can be improved by carrying out the conveyings of feeding and collecting sinchronously.</p> |
