| 摘要 |
PURPOSE:To obtain a sintered material of beta type siliceous carbide having high thermal conductivity without using a toxic substance such as BeO by burning a molded article comprising beta type siliceous carbide as a main component and carbon and boron as a sintering auxiliary under a specific condition, then heat-treating at two stages. CONSTITUTION:A molded article comprising beta type siliceous carbide as a main component is blended with carbon and boron as a sintering auxiliary or a compound containing carbon and boron to prepare a molded article. The molded article is burnt in vacuum or in an inert atmosphere to prepare a sintered material having <=10mum average crystal particle diameter. The sintered material is firstly heat-treated in a high-temperature high-pressure gas atmosphere under >=1,000 atmospheric pressure at >=1,700 deg.C. Then the sintered material is secondarily heat-treated under <=1,000 atmospheric pressure at >=1,900 deg.C Consequently, the objective sintered material beta type siliceous carbide of high thermal conductivity having >=130W/m.k thermal conductivity is obtained. |
