CHARGED PARTICLE BEAM EXPOSING METHOD AND APPARATUS THEREOF,申请号KR19890015872-传众专利搜索

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发明名称	CHARGED PARTICLE BEAM EXPOSING METHOD AND APPARATUS THEREOF
摘要
申请公布号	KR940006209(B1)	申请公布日期	1994.07.11
申请号	KR19890015872	申请日期	1989.11.02
申请人	FUJITSU LTD.	发明人	SAKAMOTO, KIICHI
分类号	H01L21/30;G03F1/14;G03F1/16;H01L21/027;(IPC1-7):H01L21/30	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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