| 摘要 |
PURPOSE:To provide a radiation detection element which is excellent in terms of energy resolution characteristic and thermal cycle resistance and the manufacturing method thereof. CONSTITUTION:A first superconductor layer 14, a barrier layer 16 and a second superconductor layer 18 are formed on a board 50. The presence of radiation is detected by entering a radiation into a joint part formed by these first superconductor layer 14, the barrier layer 16 and the second superconductor layer 18. The first superconductor layer 14 is a Ta layer, the barrier layer 16 is a TaOx layer, an AIOx layer, an HfOx layer or a ZrOx layer while a radiation stopping layer comprising a large radiative stopping power is formed on the bottom of the board 50. An opening 26, which reaches the first superconductor layer 14, is formed on the board 50 directly under the joint part and the radiation stopping layer where a radiation is entered into the joint part from the bottom of the board 50. It is also acceptable to install a base layer made of Nb, V, W, Hf, Zr or Ti to an area directly under the first superconductor layer 14.
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