| 摘要 |
PURPOSE: To sharply increase the capacitance of a capacitor and to improve a step coverage by constituting the capacitor of a lower electrode having many holes, a dielectric layer formed on the surface of the lower electrode and an upper electrode formed on the surface of the dielectric layer. CONSTITUTION: The capacitor consists of the lower electrode 32 having many holes 31 and the upper electrode 34 formed on the surface of the layer 33. For instance, a 1st conductive layer having rugged surface is formed, and after forming a 2nd insulating layer on the surface of the 1st conductive layer, the 2nd insulating layer is etched back until the projected part of the 1st conductive layer appears. Then the projected part of the 1st conductive layer is etched by using the 2nd insulating layer left in the recessed part of the 1st conductive layer as a mask to form many holes 31. Then the 2nd insulating layer is removed, and after working the 1st conductive layer as a prescribed shape, a dielectric layer 33 is formed on the surface of the 1st conductive layer. |
