| 摘要 |
PURPOSE:To provide the method for formation of polarization inversion layers capable of forming periodic metallic patterns on one main surface of a substrate and easily forming fine periodic domain inversion structures. CONSTITUTION:A plurality of a pair of anodes 11 for grounding and cathodes 12 for impressing spaced and arranged to face each other, at prescribed intervals, along the extending direction of three-dimensional waveguides 2 by holding these waveguides therebetween before or after a stage for forming the three-dimensional waveguides 2 on the main surface parallel with the axial direction where the polarization inversion in the substrate 1 consisting of a ferroelectric crystal is liable to arise. The anodes 11 for grounding are grounded and the cathodes 12 for impressing are irradiated with electron beams, by which the plural polarization inversion layers 3 are formed along the extension direction of the three-dimensional waveguides 2. |
