发明名称 DISCHARGE-PUMPED EXCIMER LASER APPARATUS
摘要 PURPOSE:To obtain the beam pattern having the uniform distribution of the intensity of light by making the surfaces of main electrodes flat, arranging insulators having the approximately equal dielectric constant effectively as that of the main electrodes with an electric field on both sides, making the surfaces of the insulators to be the same plane as the surfaces of the main electrodes. CONSTITUTION:The surfaces of main electrodes 2 and 3 are made flat. Insulators 8 and 9 and 10 and 11, whose surfaces are also flat, are arranged on both sides of the main electrodes. The surfaces of the main electrodes 2 and 3 and the insulators 8 and 9 and 10 and 11 are made to be the same plane. The dielectric constants of the insulators 8 and 9 and 10 and 11 are effectively equal to the dielectric constant of the main electrodes 2 and 3. Therefore, the electric line of force becomes orthogonal with respect to the surface. Since the electric line of force is orthogonally inputted into the main electrodes 2 and 3, the uniform distribution is obtained. Therefore, discharge current does not flow through the insulators 8-11. Thus, the boundary of the discharging region is definitely marked. As a result, the laser beam pattern having the uniform distribution of the light intensity can be realized.
申请公布号 JPH06188486(A) 申请公布日期 1994.07.08
申请号 JP19920361846 申请日期 1992.12.21
申请人 NISSIN ELECTRIC CO LTD 发明人 KUWABARA TAKUYA;KAWAKITA TAMOTSU
分类号 H01S3/038;(IPC1-7):H01S3/038 主分类号 H01S3/038
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