| 摘要 |
PURPOSE:To increase the number of fluorescent X-ray photons to be detected from a sample by providing a member for holding a plurality of semiconductor elements while integrating thermally and a single cooling means thereby increasing the detection solid angle of each semiconductor element without increasing the size of detector. CONSTITUTION:When excitation rays 2 impinge normally on the surface of a sample 1 through an excitation window 16, the region irradiated with the excitation rays becomes a source P for emitting fluorescent X-rays in all directions. The spectrum and intensity of fluorescent X-rays depend on the excitation rays 2 and the composition of the sample 1. Fluorescent X-rays emitted from the sample 1 is passed through X-ray transmission windows 10a-10d composed of a material having low atomic weight, e.g. Be, and detected by semiconductor elements 20a-20d. The semiconductor element 20a-20d are set such that the angle defined by the center line (e.g. A) of detection plane and the excitation ray 2 comes within a range of 20-45 deg. and the detection solid angle 4 of the source P with respect to the detection plane of each semiconductor element 20a-20d is determined to increase the number of X-ray photons to be detected.
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