| 摘要 |
PURPOSE:To easily produce the photomask having shifter parts varying in the thickness of the edge parts of shifter parts from the other parts. CONSTITUTION:A shifter part forming material 31 is worked by a wet etching method to form the shifter parts. Prescribed side etching is, however, generated in the shifter part forming material 31 at the time of wet etching by controlling the adhesion of resist patterns 43 to be used as an etching mask at the time of wet etching to the shifter part forming material 31. Since the thickness and shape of the edge parts of the shifter parts are controllable simultaneously with the formation of the shifter parts, the photomask having the shifter parts different in the thickness of the edge parts of the shifter parts form the other parts is produced. |
