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经营范围
发明名称
MOLDING APPARATUS
摘要
申请公布号
JPH06188279(A)
申请公布日期
1994.07.08
申请号
JP19920338334
申请日期
1992.12.18
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
KURODA HIROSHI;MIWA TAKASHI;SHIRAI MASAYUKI;MATSUNAGA TOSHIHIRO;KUBOSONO MINORU;TSUBOI TOSHIHIRO;KOSAKU HIROSHI;KIKUCHI MASAYUKI
分类号
H01L21/56;B29C45/14;(IPC1-7):H01L21/56
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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