PREPARATION OF SUPERCONDUCTING THIN FILM BY MULTILAYER STICKING

摘要

PURPOSE: To provide a method for forming a thin film of a high TC superconductor with improved control to the crystal growth of more than ternary compound provided with a relatively large unit cell. CONSTITUTION: Many block layers constituted of different base materials 71, 72 and 73 are cyclically deposited on a substrate (multi-layer deposition). The thickness of the layer is limited to the single layer of 1-20 layers, an independent annealing process is not performed and the sticking and crystallization of the thin film are completed at an almost fixed temperature. By this method, a thin film of the high TC superconductor is formed.