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经营范围
发明名称
PLASMA CVD DEVICE
摘要
申请公布号
JPH06188206(A)
申请公布日期
1994.07.08
申请号
JP19920355784
申请日期
1992.12.18
申请人
TDK CORP
发明人
MOROOKA HISAO;YOKOTA HIDEAKI;NAGANO KATSUTO
分类号
C23C16/50;C23C16/27;C23C16/511;H01L21/205;(IPC1-7):H01L21/205
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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