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发明名称
DRY ETCHING
摘要
申请公布号
JPH06188225(A)
申请公布日期
1994.07.08
申请号
JP19920340724
申请日期
1992.12.21
申请人
SONY CORP
发明人
KADOMURA SHINGO
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L21/768;(IPC1-7):H01L21/302;H01L21/320;H01L21/90
主分类号
H01L21/302
代理机构
代理人
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地址
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